White light Interferometer

Zygo New View 6300

Non-contact, three-dimensional scanning white-light and optical phase-shifting interferometer.

  • Vertical resolution up to 0.1nm
  • Lateral resolution up to 0.45um
  • Reproducibility < 0.1nm RMS
  • Maximum component size (BxLxH) 203mm x 203mm x 89mm
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