Laser Scanning Microscope LEXT OLS4100
The LEXT OLS4100 is a Laser Scanning Microscope to perform non-contact 3D observations and measurements of surface features at 10 nanometer resolutions. The system also features a fast image acquisition and a high-resolution image over a wider area.
- total magnification: 108x-17.280x
- height measurement repeatability: 50x: σn-1=0.012 μm
- height measurement accuracy: 0.2+L/100 μm or Less (L= measuring length)
- planar measurement repeatability: 100x 3σn-1=0.02 μm
- planar measurement accuracy: measurement value ±2%
- display resolution: 1nm