Laser Scanning Microscope

Laser Scanning Microscope LEXT OLS4100

The LEXT OLS4100 is a Laser Scanning Microscope to perform non-contact 3D observations and measurements of surface features at 10 nanometer resolutions. The system also features a fast image acquisition and a high-resolution image over a wider area. 


  • total magnification: 108x-17.280x
  • height measurement repeatability: 50x: σn-1=0.012 μm
  • height measurement accuracy: 0.2+L/100 μm or Less (L= measuring length)
  • planar measurement repeatability: 100x 3σn-1=0.02 μm
  • planar measurement accuracy: measurement value  ±2%
  • display resolution: 1nm


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